Vanelderen, PieterPieterVanelderenBlanco, VictorVictorBlancoMao, MingMingMaoTomczak, YoannYoannTomczakDe Roest, DavidDavidDe RoestKissoon, NicolaNicolaKissoonRincon Delgadillo, PaulinaPaulinaRincon DelgadilloRispens, GijsbertGijsbertRispensSchiffelers, GuidoGuidoSchiffelersPathak, AbhinavAbhinavPathakLazzarino, FredericFredericLazzarinoDe Simone, DaniloDaniloDe SimoneDe Poortere, EtienneEtienneDe PoortereMc Manus, MoyraMoyraMc ManusPiumi, DanieleDanielePiumiHendrickx, EricEricHendrickxVandenberghe, GeertGeertVandenberghe2021-10-272021-10-272019https://imec-publications.be/handle/20.500.12860/34310Impact of sequential infiltration synthesis (SIS) on roughness and stochastic nano-failures for EUVL patterningProceedings paperhttps://doi.org/10.1117/12.2515503