Laureyn, WimWimLaureynFrederix, FilipFilipFrederixCampitelli, AndrewAndrewCampitelliMaes, GuidoGuidoMaes2021-10-142021-10-142001https://imec-publications.be/handle/20.500.12860/5434The cleaning and silanisation of tantalum pentoxide for biosensor realisationOral presentation