In situ transmission electron microscopy study of the silicidation process in Co thin films on patterned (001) Si substrates

Ghica, C.C.GhicaNistor, LeonaLeonaNistorBender, HugoHugoBenderSteegen, AnAnSteegenLauwers, A.A.LauwersMaex, KarenKarenMaexVan Landuyt, J.J.Van Landuyt2021-10-142021-10-142001https://imec-publications.be/handle/20.500.12860/5315In situ transmission electron microscopy study of the silicidation process in Co thin films on patterned (001) Si substratesJournal article