Selective patterning of amorphous silicon on MoS2 for enabling transition-metal dichalcogenide heterostructures

Heyne, MarkusMarkusHeynede Marneffe, Jean-FrancoisJean-Francoisde MarneffeGoodyear, AndyAndyGoodyearCooke, MikeMikeCookeRadu, IulianaIulianaRaduNeyts, Erik C.Erik C.NeytsDe Gendt, StefanStefanDe Gendt2021-10-242021-10-242017https://imec-publications.be/handle/20.500.12860/28504Selective patterning of amorphous silicon on MoS2 for enabling transition-metal dichalcogenide heterostructuresMeeting abstracthttps://mrsspring.zerista.com/poster/member/84886