De Keyser, K.K.De KeyserVan Bockstael, C.C.Van BockstaelVan Meirhaeghe, R.L.R.L.Van MeirhaegheDetavernier, C.C.DetavernierVerleysen, EvelineEvelineVerleysenBender, HugoHugoBenderVandervorst, WilfriedWilfriedVandervorstJordan-Sweet, J.J.Jordan-SweetLavoie, C.C.Lavoie2021-10-182021-10-1820100003-6951https://imec-publications.be/handle/20.500.12860/16946Phase formation and thermal stability of ultrathin nickel-silicides on Si(100)Journal article