Verdonck, PatrickPatrickVerdonckVan Cauwenberghe, MarcMarcVan CauwenberghePhommahaxay, AlainAlainPhommahaxayJamieson, GeraldineGeraldineJamiesonBogaerts, LieveLieveBogaertsCotrin Teixeira, RicardoRicardoCotrin TeixeiraHuyghebaert, CedricCedricHuyghebaertTutunjyan, NinaNinaTutunjyanBearda, TwanTwanBeardaBoullart, WernerWernerBoullart2021-10-182021-10-182009https://imec-publications.be/handle/20.500.12860/16465The influence of grinding and cleaning on Deep Reactive Ion EtchingMeeting abstract