Katti, GuruprasadGuruprasadKattiStucchi, MicheleMicheleStucchiDe Meyer, KristinKristinDe MeyerDehaene, WimWimDehaene2021-10-182021-10-1820100018-9383https://imec-publications.be/handle/20.500.12860/17354Electrical modeling and characterization of through silicon via for three-dimensional ICsJournal article