Ferain, IsabelleIsabelleFerainCollaert, NadineNadineCollaertO'Sullivan, BarryBarryO'SullivanConard, ThierryThierryConardPopovici, Mihaela IoanaMihaela IoanaPopoviciVan Elshocht, SvenSvenVan ElshochtSwerts, JohanJohanSwertsJurczak, GosiaGosiaJurczakDe Meyer, KristinKristinDe Meyer2021-10-172021-10-172008https://imec-publications.be/handle/20.500.12860/13720Metal gate thickness optimization for MuGFET performance improvementProceedings paper