Carchon, GeertGeertCarchonRottenberg, XavierXavierRottenbergTilmans, HarrieHarrieTilmansDe Raedt, WalterWalterDe Raedt2021-10-152021-10-152003-05https://imec-publications.be/handle/20.500.12860/7282MCM-D and RF-MEMS for integrated millimetre wave functionsProceedings paper