High resolution medium energy ion scattering analysis for the quantitative depth profiling of ultra thin high-k Hf based films

Van den berg, J.J.Van den bergReading, M.A.M.A.ReadingArmour, D.G.D.G.ArmourBailey, P.P.BaileyNoakes, T.T.NoakesConard, ThierryThierryConardDe Gendt, StefanStefanDe Gendt2021-10-182021-10-182009https://imec-publications.be/handle/20.500.12860/16360High resolution medium energy ion scattering analysis for the quantitative depth profiling of ultra thin high-k Hf based filmsMeeting abstract