Tilmans, HarrieHarrieTilmansFullin, E.E.FullinZiad, HocineHocineZiadVan De Peer, MyriamMyriamVan De PeerKesters, J.J.KestersVan Geffen, E.E.Van GeffenBergqvist, J.J.BergqvistPantus, M.M.PantusBeyne, EricEricBeyneBaert, KrisKrisBaertNaso, F.F.Naso2021-10-142021-10-141999https://imec-publications.be/handle/20.500.12860/3881A fully packaged electromagnetic microrelayProceedings paper