Elucidating the role of imaging metrics for variability and after etch defectivity

Franke, Joern-HolgerJoern-HolgerFrankeFrommhold, AndreasAndreasFrommholdDauendorffer, ArnaudArnaudDauendorfferNafus, KathleenKathleenNafusRispens, GijsbertGijsbertRispensMaslow, MarkMarkMaslow2023-03-172022-08-122023-03-1720221932-5150WOS:000835428700013https://imec-publications.be/handle/20.500.12860/40251Elucidating the role of imaging metrics for variability and after etch defectivityJournal article10.1117/1.JMM.21.2.023201WOS:000835428700013