Extraction of physical parameters of alternative high-k gate stacks through comparison between measurements and quantum simulations

Campera, A.A.CamperaIannaccone, G.G.IannacconeCrupi, F.F.CrupiGroeseneken, GuidoGuidoGroeseneken2021-10-162021-10-162005-04https://imec-publications.be/handle/20.500.12860/10173Extraction of physical parameters of alternative high-k gate stacks through comparison between measurements and quantum simulationsProceedings paper