Vandervorst, WilfriedWilfriedVandervorstJurczak, GosiaGosiaJurczakFoad, MajeedMajeedFoaddel Agua Borniquel, Jose IgnacioJose Ignaciodel Agua BorniquelPorshnev, PeterPeterPorshnevEveraert, Jean-LucJean-LucEveraertPoon, TzeTzePoon2021-10-162021-10-162007https://imec-publications.be/handle/20.500.12860/13127Meeting the doping challenges of device scalingJournal article