Ruthenium Atomic Layer Deposition (ALD)-enabled selectivity of Cobalt Electroless Layer Deposition (ELD) on dielectrics

Zyulkov, IvanIvanZyulkovKrishtab, MikhailMikhailKrishtabDe Gendt, StefanStefanDe GendtArmini, SilviaSilviaArmini2021-10-232021-10-232016https://imec-publications.be/handle/20.500.12860/27681Ruthenium Atomic Layer Deposition (ALD)-enabled selectivity of Cobalt Electroless Layer Deposition (ELD) on dielectricsMeeting abstract