Hardy, AnAnHardyVan Elshocht, SvenSvenVan ElshochtAdelmann, ChristophChristophAdelmannConard, ThierryThierryConardFranquet, AlexisAlexisFranquetDouheret, OlivierOlivierDouheretHaeldermans, IlseIlseHaeldermansD'Haen, JanJanD'HaenDe Gendt, StefanStefanDe GendtCaymax, MattyMattyCaymaxHeyns, MarcMarcHeynsD'Olieslaeger, MarcMarcD'OlieslaegerVan Bael, MarliesMarliesVan BaelMullens, J.J.Mullens2021-10-172021-10-1720080040-6090https://imec-publications.be/handle/20.500.12860/13840Aqueous solution–gel preparation of ultrathin ZrO2 films for gate dielectric applicationJournal article