Vincent, BenjaminBenjaminVincentLoo, RogerRogerLooVandervorst, WilfriedWilfriedVandervorstBrammertz, GuyGuyBrammertzMitard, JeromeJeromeMitardDe Jaeger, BriceBriceDe JaegerValev, V.V.ValevVerbiest, T.T.VerbiestTakeuchi, S.S.TakeuchiZaima, S.S.ZaimaRip, JensJensRipBrijs, BertBertBrijsConard, ThierryThierryConardCaymax, MattyMattyCaymax2021-10-192021-10-192010https://imec-publications.be/handle/20.500.12860/18303Si passivation for Ge pMOSFETs: influence of Si precursor during RPCVD growthProceedings paper