Iacopi, FrancescaFrancescaIacopiWaldfried, CarloCarloWaldfriedAbell, ThomasThomasAbellGuyer, EricEricGuyerEyckens, BrendaBrendaEyckensTravaly, YoussefYoussefTravalySajavaara, TimoTimoSajavaaraGage, David M.David M.GageBeyer, GeraldGeraldBeyerBerry, IvanIvanBerryDauskardt, ReinholdReinholdDauskardtMaex, KarenKarenMaex2021-10-162021-10-162005https://imec-publications.be/handle/20.500.12860/10630Effects of UV-cure on mechanical, physical and electrical properties of microporous SiOC:H dielectric filmsOral presentation