Badenes, GonçalGonçalBadenesRooyackers, RitaRitaRooyackersJones, S. K.S. K.JonesBazley, D.D.BazleyBeanland, R.R.BeanlandDe Wolf, IngridIngridDe WolfDeferm, LudoLudoDeferm2021-09-302021-09-301998https://imec-publications.be/handle/20.500.12860/2352Optimization of polysilicon encapsulated local oxidation of siliconJournal article