Fedina, L.L.FedinaVan Landuyt, J.J.Van LanduytVanhellemont, JanJanVanhellemontAseev, A.A.Aseev2021-09-292021-09-291995https://imec-publications.be/handle/20.500.12860/647Observation of vacancy clustering in Si crystals during in situ electron irradiation in a high voltage electron microscopeProceedings paper