Vanhellemont, JanJanVanhellemontKissinger, G.G.KissingerKenis, KarineKarineKenisDepas, MichelMichelDepasGräf, D.D.GräfLambert, U.U.LambertWagner, PatrickPatrickWagner2021-09-292021-09-291996https://imec-publications.be/handle/20.500.12860/1613On the impact of grown-in substrate defects and iron contamination on gate oxide integrityProceedings paper