Excimer laser ablation based microlens fabrication for optical fiber coupling purposes

Naessens, KrisKrisNaessensVan Daele, PeterPeterVan DaeleBaets, RoelRoelBaets2021-10-152021-10-152003https://imec-publications.be/handle/20.500.12860/7923Excimer laser ablation based microlens fabrication for optical fiber coupling purposesProceedings paper