Alloatti, L.L.AlloattiKorn, D.D.KornHillerkuss, D.D.HillerkussVallaitis, T.T.VallaitisLi, J.J.LiBonk, R.R.BonkPalmer, R.R.PalmerSchellinger, T.T.SchellingerKoos, C.C.KoosFreude, W.W.FreudeLeuthold, J.J.LeutholdBarklund, A.A.BarklundDinu, R.R.DinuWieland, J.J.WielandFournier, M.M.FournierFedeli, J.J.FedeliBogaerts, WimWimBogaertsDumon, PieterPieterDumonBaets, RoelRoelBaets2021-10-182021-10-182010https://imec-publications.be/handle/20.500.12860/16645Silicon high-speed electro-optic modulatorProceedings paper