Directed self-assembly process integration – fin patterning approaches and challenges

Sayan, SafakSafakSayanChan, BTBTChanGronheid, RoelRoelGronheidVan Roey, FriedaFriedaVan RoeyKim, Min-SooMin-SooKimWilliamson, LanceLanceWilliamsonNealey, PaulPaulNealey2021-10-222021-10-222014https://imec-publications.be/handle/20.500.12860/24483Directed self-assembly process integration – fin patterning approaches and challengesProceedings paperhttp://proceedings.spiedigitallibrary.org/proceeding.aspx?articleid=1854371