De Coster, JeroenJeroenDe CosterTilmans, HarrieHarrieTilmansvan Beek, J.T.M.J.T.M.van BeekRijks, T.G.S.M.T.G.S.M.RijksPuers, BobBobPuers2021-10-152021-10-152004https://imec-publications.be/handle/20.500.12860/8754The influence of mechanical shock on the operation of electrostatically driven RF-MEMS switchesJournal article