Evaluation of cleaning recipes based on ozonated water for pre-gate oxide cleaning

Jeon, J. S.J. S.JeonOgle, B.B.OgleBaeyens, MartienMartienBaeyensMertens, PaulPaulMertens2021-09-302021-09-301998https://imec-publications.be/handle/20.500.12860/2652Evaluation of cleaning recipes based on ozonated water for pre-gate oxide cleaningOral presentation