Heterogeneous integration of GaInAsSb p-i-n photodiodes on a silicon-on-insulator waveguide circuit

Hattasan, NannichaNannichaHattasanGassenq, AlbanAlbanGassenqCerutti, LaurentLaurentCeruttiRogriguez, Jean-BaptisteJean-BaptisteRogriguezTournie, EricEricTournieRoelkens, GuntherGuntherRoelkens2021-10-192021-10-192011-121041-1135https://imec-publications.be/handle/20.500.12860/19052Heterogeneous integration of GaInAsSb p-i-n photodiodes on a silicon-on-insulator waveguide circuitJournal article