Contact inspection of Si nanowire with SEM voltage contrast

Ohashi, TakeyoshiTakeyoshiOhashiYamaguchi, AtsukoAtsukoYamaguchiHasumi, KazuhisaKazuhisaHasumiIkota, MasamiMasamiIkotaLorusso, GianGianLorussoHoriguchi, NaotoNaotoHoriguchi2021-10-262021-10-262018https://imec-publications.be/handle/20.500.12860/31443Contact inspection of Si nanowire with SEM voltage contrastProceedings paperhttps://doi.org/10.1117/12.2296992