Investigation of Microwave Loss Induced by Oxide Regrowth in High-Q Niobium Resonators

Verjauw, JeroenJeroenVerjauwPotocnik, AntonAntonPotocnikMongillo, MassimoMassimoMongilloAcharya, RohithRohithAcharyaMohiyaddin, Fahd AyyalilFahd AyyalilMohiyaddinSimion, GeorgeGeorgeSimionPacco, AntoineAntoinePaccoIvanov, TsvetanTsvetanIvanovWan, DannyDannyWanVanleenhove, AnjaAnjaVanleenhoveSouriau, LaurentLaurentSouriauJussot, JulienJulienJussotThiam, ArameArameThiamSwerts, JohanJohanSwertsPiao, XiaoyuXiaoyuPiaoCouet, SebastienSebastienCouetHeyns, MarcMarcHeynsGovoreanu, BogdanBogdanGovoreanuRadu, IulianaIulianaRadu2022-06-092021-11-022022-05-192022-06-0920212331-7019WOS:000677677600005https://imec-publications.be/handle/20.500.12860/37727Investigation of Microwave Loss Induced by Oxide Regrowth in High-Q Niobium ResonatorsJournal article10.1103/PhysRevApplied.16.014018WOS:000677677600005OXIDATIONGROWTHSURFACESSILICONNB