Joi, A.A.JoiLesniewska, AlicjaAlicjaLesniewskaDictus, DriesDriesDictusTso, K. C.K. C.TsoVenkatraman, K.K.VenkatramanDordi, J.J.DordiCroes, KristofKristofCroesTokei, ZsoltZsoltTokeiYadav, S. K.S. K.YadavWu, P. W.P. W.Wu2023-02-202022-11-302023-02-2020220021-8979WOS:000880314300003https://imec-publications.be/handle/20.500.12860/40805Doped Ru to enable next generation barrier-less interconnectJournal article10.1063/5.0108688WOS:000880314300003TOTAL-ENERGY CALCULATIONS