Deposition of 60nm thin Sr0.8Bi2.2Ta2O9 layers for application in scaled 1T1C and 1T FeRAM devices

Goux, LudovicLudovicGouxXu, ZhenZhenXuKaczer, BenBenKaczerGroeseneken, GuidoGuidoGroesenekenWouters, DirkDirkWouters2021-10-162021-10-162005-06https://imec-publications.be/handle/20.500.12860/10521Deposition of 60nm thin Sr0.8Bi2.2Ta2O9 layers for application in scaled 1T1C and 1T FeRAM devicesJournal article