Verdonck, PatrickPatrickVerdonckSamara, VladimirVladimirSamaraGoodyear, AlecAlecGoodyearFerchichi, AbdelkarimAbdelkarimFerchichiVan Besien, ElsElsVan BesienBaklanov, MikhaïlMikhaïlBaklanovBraithwaite, NicholasNicholasBraithwaite2021-10-192021-10-1920110040-6090https://imec-publications.be/handle/20.500.12860/20052Influence of the ion bombardment of O2 plasmas on low-k materialsJournal article10.1016/j.tsf.2011.06.046