From zero- to second-level packaging of RF-MEMS devices

Jourdain, AnneAnneJourdainVaesen, KristofKristofVaesenScheer, JaccoJaccoScheerWeekamp, WimWimWeekampvan Beek, JoostJoostvan BeekTilmans, HarrieHarrieTilmans2021-10-162021-10-162005https://imec-publications.be/handle/20.500.12860/10665From zero- to second-level packaging of RF-MEMS devicesProceedings paper