Hydrogen plasma-enhanced thermal donor formation in n-type oxygen-doped high-resistivity float-zone silicon

Simoen, EddyEddySimoenClaeys, CorCorClaeysJob, R.R.JobUlyashin, A.G.A.G.UlyashinFahrner, W.R.W.R.FahrnerDe Gryse, O.O.De GryseClauws, P.P.Clauws2021-10-142021-10-142002https://imec-publications.be/handle/20.500.12860/6830Hydrogen plasma-enhanced thermal donor formation in n-type oxygen-doped high-resistivity float-zone siliconJournal article