Improved ohmic performance by the metallic bilayer contact stack of oxygen-incorporated La/ultrathin TiSi on n-Si

Wang, LinlinLinlinWangYu, HaoHaoYuSchaekers, MarcMarcSchaekersEveraert, Jean-LucJean-LucEveraertMocuta, DanDanMocutaHoriguchi, NaotoNaotoHoriguchiCollaert, NadineNadineCollaertDe Meyer, KristinKristinDe MeyerJiang, Yu-longYu-longJiang2021-10-262021-10-2620180018-9383https://imec-publications.be/handle/20.500.12860/32242Improved ohmic performance by the metallic bilayer contact stack of oxygen-incorporated La/ultrathin TiSi on n-SiJournal articlehttps://ieeexplore.ieee.org/document/8310026/