Low frequency noise analysis as a diagnostic tool to assess the quality of 0.25 μm Ti-silicided poly-lines..

testVandamme, EwoutEwoutVandammeDe Wolf, IngridIngridDe WolfLauwers, AnneAnneLauwersVandamme, LorenzLorenzVandamme2021-10-012021-10-011998https://imec-publications.be/handle/20.500.12860/3074Low frequency noise analysis as a diagnostic tool to assess the quality of 0.25 μm Ti-silicided poly-lines..Journal article