SrTiO3 for sub-20 nm DRAM technology nodes – characterization and modeling

Kaczer, BenBenKaczerLarcher, LucaLucaLarcherVandelli, LucaLucaVandelliResinger, HansHansResingerPopovici, Mihaela IoanaMihaela IoanaPopoviciClima, SergiuSergiuClimaJi, ZhigangZhigangJiJoshi, SaumyaSaumyaJoshiSwerts, JohanJohanSwertsRedolfi, AugustoAugustoRedolfiAfanasiev, ValeriValeriAfanasievJurczak, GosiaGosiaJurczak2021-10-222021-10-222014https://imec-publications.be/handle/20.500.12860/24022SrTiO3 for sub-20 nm DRAM technology nodes – characterization and modelingProceedings paper