Multifunctional Top-Coats Strategy for DSA of High-chi Block Copolymers

Chevalier, XavierXavierChevalierCorreia, Cindy GomesCindy GomesCorreiaPound-Lana, GwenaelleGwenaellePound-LanaBezard, PhilippePhilippeBezardSerege, MatthieuMatthieuSeregePetit-Etienne, CamilleCamillePetit-EtienneGay, GuillaumeGuillaumeGayCunge, GillesGillesCungeCabannes-Boue, BenjaminBenjaminCabannes-BoueNicolet, CeliaCeliaNicoletNavarro, ChristopheChristopheNavarroCayrefource, IanIanCayrefourceMueller, MarcusMarcusMuellerHadziioannou, GeorgesGeorgesHadziioannouIliopoulos, IliasIliasIliopoulosFleury, GuillaumeGuillaumeFleuryZelsmann, MarcMarcZelsmann2023-08-082023-06-202023-08-0820210914-9244WOS:000755962200003https://imec-publications.be/handle/20.500.12860/41903Multifunctional Top-Coats Strategy for DSA of High-chi Block CopolymersJournal article10.2494/photopolymer.34.11WOS:000755962200003ORIENTATION