Peter, AntonyAntonyPeterMeersschaut, JohanJohanMeersschautRichard, OlivierOlivierRichardMoussa, AlainAlainMoussaSteenbergen, JohnnyJohnnySteenbergenSchaekers, MarcMarcSchaekersTokei, ZsoltZsoltTokeiVan Elshocht, SvenSvenVan ElshochtAdelmann, ChristophChristophAdelmann2021-10-222021-10-2220150897-4756https://imec-publications.be/handle/20.500.12860/25753Phase formation and morphology of nickel silicide thin films synthesized by catalyzed chemical vapor reaction of nickel with silaneJournal articlehttp://pubs.acs.org/doi/abs/10.1021/cm503810p