Toward nano-electronics applications of metal-insulator transition materials – atomic layer deposition of VO2 and a selector device concept

Peter, AntonyAntonyPeterMartens, KoenKoenMartensRadu, IulianaIulianaRaduXu, NuoNuoXuRampelberg, GeertGeertRampelbergAdelmann, ChristophChristophAdelmannDetavernier, ChristopheChristopheDetavernierHeyns, MarcMarcHeynsJurczak, GosiaGosiaJurczak2021-10-222021-10-222015https://imec-publications.be/handle/20.500.12860/25751Toward nano-electronics applications of metal-insulator transition materials – atomic layer deposition of VO2 and a selector device conceptMeeting abstract