Optimizing EUV Imaging Metrics as a Function of Absorber Thickness and Illumination Source: Simulation Case Study of Ta-Co alloys

Philipsen, VickyVickyPhilipsenThakare, DeveshDeveshThakareDelabie, AnneliesAnneliesDelabie2023-06-082022-12-112022-12-192023-06-082022978-1-5106-6049-60277-786XWOS:000890070800003https://imec-publications.be/handle/20.500.12860/40858Optimizing EUV Imaging Metrics as a Function of Absorber Thickness and Illumination Source: Simulation Case Study of Ta-Co alloysProceedings paper10.1117/12.2640098978-1-5106-6050-2WOS:000890070800003