Determination of critical parameters for control of directed self-assembly of block copolymers using frequency multiplication

Rincon Delgadillo, PaulinaPaulinaRincon DelgadilloNealey, PaulPaulNealeyGronheid, RoelRoelGronheidNafus, KathleenKathleenNafusSomervell, MarkMarkSomervellCao, YiYiCaoLin, GuanyangGuanyangLin2021-10-202021-10-202012https://imec-publications.be/handle/20.500.12860/21393Determination of critical parameters for control of directed self-assembly of block copolymers using frequency multiplicationOral presentation