Iodine enhanced focused-ion-beam etching of silicon for photonic applications

Schrauwen, JonathanJonathanSchrauwenVan Thourhout, DriesDriesVan ThourhoutBaets, RoelRoelBaets2021-10-162021-10-162007-11https://imec-publications.be/handle/20.500.12860/12869Iodine enhanced focused-ion-beam etching of silicon for photonic applicationsJournal article