DESIGN AND FABRICATION OF INTEGRATED PIEZOELECTRIC MICROPUMP WITH VORTEX ENHANCEMENT OPTIMIZATION

Liang, BoshenBoshenLiangPaquet, LouisLouisPaquetJeong, YongbinYongbinJeongHeremans, PaulPaulHeremansCheyns, DavidDavidCheyns2022-03-142022-03-1420212474-3747WOS:000693407600171https://imec-publications.be/handle/20.500.12860/39429DESIGN AND FABRICATION OF INTEGRATED PIEZOELECTRIC MICROPUMP WITH VORTEX ENHANCEMENT OPTIMIZATIONProceedings paper10.1109/NEMS51815.2021.9451478978-0-7381-2429-2WOS:000693407600171ELEMENTS