Polysilicon encapsulated LOCOS: a technique for deep submicron lateral isolation

Badenes, GonçalGonçalBadenesRooyackers, RitaRitaRooyackersDeferm, LudoLudoDeferm2021-09-302021-09-301997https://imec-publications.be/handle/20.500.12860/1708Polysilicon encapsulated LOCOS: a technique for deep submicron lateral isolationProceedings paper