De Gendt, StefanStefanDe GendtCaymax, MattyMattyCaymaxChen, J.J.ChenClaes, MartineMartineClaesConard, ThierryThierryConardDelabie, AnneliesAnneliesDelabieDeweerd, WimWimDeweerdKaushik, VidyaVidyaKaushikKerber, AndreasAndreasKerberKubicek, StefanStefanKubicekNiwa, M.M.NiwaPantisano, LuigiLuigiPantisanoPuurunen, RiikkaRiikkaPuurunenRagnarsson, Lars-AkeLars-AkeRagnarssonSchram, TomTomSchramShimamoto, YasuhiroYasuhiroShimamotoTsai, WilmanWilmanTsaiRohr, ErikaErikaRohrVan Elshocht, SvenSvenVan ElshochtVandervorst, WilfriedWilfriedVandervorstWitters, ThomasThomasWittersYoung, EdwardEdwardYoungZhao, ChaoChaoZhaoHeyns, MarcMarcHeyns2021-10-152021-10-152004https://imec-publications.be/handle/20.500.12860/8760Scaling of HF-based gate dielectrics - intgeration with polysilicon gatesProceedings paper