Sensitive, small, broadband and scalable optomechanical ultrasound sensor in silicon photonics

Westerveld, WouterWouterWesterveldMahmud Ul Hasan, Hasan MDHasan MDMahmud Ul HasanShnaiderman, RamiRamiShnaidermanNtziachristos, VasilisVasilisNtziachristosRottenberg, XavierXavierRottenbergSeveri, SimoneSimoneSeveriRochus, VeroniqueVeroniqueRochus2022-11-032021-11-022022-11-0320211749-4885WOS:000627675300002https://imec-publications.be/handle/20.500.12860/38068Sensitive, small, broadband and scalable optomechanical ultrasound sensor in silicon photonicsJournal article10.1038/s41566-021-00776-0WOS:000627675300002RESONATORDETECTOR