Effect of Si surface roughness on the current-voltage characteristics of ultra-thin gate oxides

Houssa, MichelMichelHoussaNigam, TanyaTanyaNigamMertens, PaulPaulMertensHeyns, MarcMarcHeyns2021-10-062021-10-061999https://imec-publications.be/handle/20.500.12860/3523Effect of Si surface roughness on the current-voltage characteristics of ultra-thin gate oxidesProceedings paper