Nag, ManojManojNagRockele, MaartenMaartenRockeleSteudel, SoerenSoerenSteudelVaisman Chasin, AdrianAdrianVaisman ChasinMyny, KrisKrisMynyBhoolokam, AjayAjayBhoolokamWillegems, MyriamMyriamWillegemsSmout, SteveSteveSmoutVicca, PeterPeterViccaAmeys, MarcMarcAmeysKe, Tung HueiTung HueiKeSchols, SarahSarahScholsGenoe, JanJanGenoeGroeseneken, GuidoGuidoGroesenekenHeremans, PaulPaulHeremans2021-10-212021-10-2120131071-0922https://imec-publications.be/handle/20.500.12860/22841Novel back-channel-etch process flow based a-IGZO TFTs for circuit and display applications on PEN- foilJournal articlehttp://onlinelibrary.wiley.com/doi/10.1002/jsid.189/abstract