Transfer of line edge roughness during gate patterning processes

Leunissen, PeterPeterLeunissenErcken, MoniqueMoniqueErckenRonse, KurtKurtRonseDerksen, Giljam B.Giljam B.Derksen2021-10-152021-10-152004https://imec-publications.be/handle/20.500.12860/9193Transfer of line edge roughness during gate patterning processesProceedings paper